Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes
Rius, Gemma (Nagoya Institute of Technology, NITech)
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona)
Matsui, Soichiro (Nagoya Institute of Technology, NITech)
Tanemura, Masaki (Nagoya Institute of Technology, NITech)
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)

Data:	2015
Resum:	Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. LAO through the non-contact mode of atomic force microscopy (AFM) has proven to yield a better resolution and tip preservation than the contact mode and it can be effectively performed in the dynamic mode of AFM. The tip plays a crucial role for the LAO-AFM, because it regulates the minimum feature size and the electric field. For instance, the feasibility of carbon nanotube (CNT)-functionalized tips showed great promise for LAO-AFM, yet, the fabrication of CNT tips presents difficulties. Here, we explore the use of a carbon nanofiber (CNF) as the tip apex of AFM probes for the application of LAO on silicon substrates in the AFM amplitude modulation dynamic mode of operation. We show the good performance of CNF-AFM probes in terms of resolution and reproducibility, as well as demonstration that the CNF apex provides enhanced conditions in terms of field-induced, chemical process efficiency.
Ajuts:	Agència de Gestió d'Ajuts Universitaris i de Recerca CSIC10-4E-805
Drets:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Llengua:	Anglès
Document:	Article ; recerca ; Versió publicada
Matèria:	Carbon nanofiber ; Dynamic mode ; Local anodic oxidation ; Nanopatterning
Publicat a:	Beilstein journal of nanotechnology, Vol. 6 (january 2015) , p. 215-222, ISSN 2190-4286

DOI: 10.3762/bjnano.6.20
PMID: 25671165

8 p, 2.0 MB

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